Suspension system for laser discharge unit
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United States of America Patent
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Issued Date -
May 27, 2004
app pub date -
Aug 22, 2003
filing date -
Aug 28, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A suspension system for suspending a laser discharge unit (LDU) is provided herein. The suspension system includes steel W-springs instead of rubber blocks. The new design increases long time position stability and position accuracy after remounting of the LDU. Further isolation of vibrations caused by the fan of the LDU to the optics frame is increased, too. With the new steel W-spring suspension the maximum amplitudes of the vibrations are a factor 2.5 till 6 lower than with the rubber block suspension.
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