Method for vacuum treatment of workpieces and vacuum treatment installation
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
May 20, 2004
app pub date -
Nov 13, 2003
filing date -
Apr 16, 1999
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method for manufacturing workpieces treated in a vacuum includes providing first and second vacuum chambers having first and second vacuum pumps, respectively. A vacuum is generated in the first and second vacuum chambers using the second vacuum pump. The second vacuum pump is connected by valves between the first vacuum chamber through the first vacuum pump and the second vacuum chamber. The valves are operated to evacuate the second vacuum chamber, followed by processing the workpieces in the first vacuum chamber.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully