Method for evaluating layers of images

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United States of America Patent

APP PUB NO 20040095638A1
SERIAL NO

10471520

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention is directed to a method for evaluating layer images (A, B, C, D, E) which are recorded by microscope from planes of different depths in focusing direction z of an object. Every layer image (A, B, C, D, E) is composed of a plurality of image points (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij); an intensity value is determined for every image point (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij) or for image areas comprising a plurality of these image points (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij); the intensity values for image points (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij) or image areas lying one above the other in z-direction are combined; a parameter characteristic of these image points (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij) or image areas is determined and ordered within a grid corresponding to the grid of the image points (A.sub.ij, B.sub.ij, C.sub.ij, D.sub.ij, E.sub.ij). In this way, information about the topography of the object, for example, can be obtained and displayed.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROELECTRONIC SYSTEMS GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Engel, Thomas Erfurt OT Niedernissa, DE 89 868
Herbig, Volker Erfurt, DE 2 13

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