Device for joining substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 27, 2007
Grant Date -
May 20, 2004
app pub date -
Mar 1, 2002
filing date -
Mar 21, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus is provided for joining together substrates, which have an inner hole, to form a substrate disk. An expandable element is introducible into the inner hole of at least two superimposed substrates. The element is expandable to such an extent that it can come into contact with the inner holes of both of the substrates to close off an intermediate space formed between the substrates relative to the environment. A substrate support is rotatable about an axis of rotation perpendicular to a support surface thereof. A centering device is rotatably coupled with the substrate support and is movable relative thereto in the direction of the axis of rotation. The expandable element is disposed, and is compressible, between the substrate support and the centering device.
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