Microscopy system

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United States of America Patent

APP PUB NO 20040090667A1
SERIAL NO

10393358

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microscopy system for imaging an object is proposed, comprising: microscopy optics including an objective system (3) with an object plane (13) whose working distance (A) from the objective system is adjustable, and a first projection system for projecting at least one shaped analysis light beam (33, 34) onto the object and for generating at least one light spot (39) on the same. The analysis light beam (33, 34) is shaped such that a shape of a cross-section of the analysis light beam (33, 34) changes in beam direction. The microscopy system may further comprise: a position-sensitive radiation detector (51), an imaging optics for imaging the at least one light spot (39) generated on the object on the position-sensitive radiation detector (51), and a circuit (61) for evaluating the detected light spot and for supplying a focusing signal on the basis of a shape of the light spot (39).

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Patent Owner(s)

Patent OwnerAddress
CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS89518 HEIDENHEIM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaida, Gerhard Aalen, DE 24 557
Gartner, Hartmut Oberkochen, DE 12 284
Nagele, Ulrich Bartholoma, DE 6 48
Obrebski, Andreas Dusseldorf, DE 20 282

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