Adjustable wafer alignment arm
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United States of America Patent
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N/A
Issued Date -
Apr 15, 2004
app pub date -
Jul 18, 2003
filing date -
Jul 18, 2002
priority date (Note) -
Abandoned
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Abstract
A wafer handler for semiconductors or like substrates for significantly reduces alignment problems by reducing or eliminating sagging in large diameter wafers such as 300 mm wafers.
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