Apparatus for detecting an amount of strain and method for manufacturing same
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United States of America Patent
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Issued Date -
Apr 1, 2004
app pub date -
Sep 25, 2003
filing date -
Sep 30, 2002
priority date (Note) -
Abandoned
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Abstract
An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain generating part. The sensing elements are formed on the electrical insulating layer. Each of the sensing elements is made of a silicon film. The silicon film comprises a poly-crystalline main layer and a poly-crystalline interface-layer, which comes into contact with the electrical insulating layer.
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