Pivoting optical micromirror, array for such micromirrors and method for making same
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United States of America Patent
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Issued Date -
Apr 1, 2004
app pub date -
Aug 14, 2003
filing date -
Feb 15, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
This invention relates to a micro-mirror comprising a fixed part (31), a movable part (41, 48) comprising means of reflection (48) and means of articulation linking the movable part to the fixed part, this micro-mirror is characterised in that the means of articulation are made of a pivot hinge (47) located under the movable part between the latter and the fixed part and capable of allowing displacement of the movable part according to axes of rotation contained in the movable part and going through the axis of the pivot hinge, and in which the fixed comprises at least a cavity (36) facing at least a zone of an end of the movable part. The invention also relates to a matrix of pivoting micro-mirrors and a manufacturing process of such micro-mirrors. These micro-mirrors can notably be used in optical routing systems or in image projection systems.
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