Alloy target used for producing flat panel displays
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United States of America Patent
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Issued Date -
Mar 25, 2004
app pub date -
Jul 31, 2003
filing date -
Jul 31, 2002
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Abstract
The present invention is related to an alloy target used for producing thin film electrodes, consisting of silver (Ag), copper (Cu), and at least one precious metal selected from the group consisting of palladium (Pd), gold (Au) and platinum (Pt); wherein the mole ratio of said silver ranges from 0.8 to 0.999; the mole ratio of said copper ranges from 0.001 to 0.1; the mole ratio of said precious metal ranges from 0.001 to 0.1; and the total mole ratio of said alloy target is 1.
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