Method for fabricating a transducer
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United States of America Patent
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Sep 12, 2006
Grant Date -
Mar 4, 2004
app pub date -
Jan 6, 2003
filing date -
Apr 16, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.
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