Method and apparatus for producing silicon oxide-based ceramic membrane by gas phase synthesis
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United States of America Patent
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Issued Date -
Feb 19, 2004
app pub date -
Aug 15, 2003
filing date -
Aug 15, 2002
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Abandoned
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Abstract
A method for producing a silicon oxide-based ceramic membrane on a surface of a porous substrate from a silica source and an aqueous alkaline solution (or an aqueous alkaline solution of an alumina source) by a gas phase reaction comprises the step of heating the silica source and the aqueous alkaline solution (or the aqueous alkaline solution of an alumina source) in an airtight vessel without mixing them.
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