Nanotube apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jan 29, 2004
app pub date -
Jul 21, 2003
filing date -
Sep 25, 2000
priority date (Note) -
Abandoned
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Abstract
A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on a MEMS substrate on which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.
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