Method and apparatus for supporting a substrate
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United States of America Patent
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N/A
Issued Date -
Jan 29, 2004
app pub date -
Jun 19, 2002
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus and method for performing operations on an electronic substrate includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system coupled to the frame that supports the substrate during a manufacturing operation on the substrate, wherein the substrate support system includes a deformable material, and a device coupled to the frame that performs an operation on a surface of the substrate. Manufacturing operations are performed on the substrate while the substrate is substantially evenly supported by the deformable material.
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