Micromirrors array with improved light throughput
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United States of America Patent
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Nov 29, 2005
Grant Date -
Jan 22, 2004
app pub date -
Jul 15, 2003
filing date -
Jul 16, 2002
priority date (Note) -
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Abstract
A micromirror array device comprising at least two of a plurality of zones of separately controllable tiltable reflecting elements, each of the tiltable reflecting elements of a zone being capable of tilting about an axis of predetermined tilt orientation associated with the zone between a first reflecting position reflecting an incident beam to a predetermined first direction (on direction), and a second reflecting position reflecting the incident beam to a predetermined second direction (off direction), each of the zones having a predetermined tilt orientation for all reflecting elements in that zone, that is different from the tilt orientation of at least one other zone of the zones.
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