Resist stripping equipment
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United States of America Patent
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N/A
Issued Date -
Jan 22, 2004
app pub date -
Jul 7, 2003
filing date -
Jul 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Resist stripping equipment includes a resist stripping system which includes a plurality of resist stripping chambers provided in a connected row arrangement and a rinse system which includes a rinse chamber. Insides of the resist stripping chambers are purged with nitrogen gas from a nitrogen gas supply system. Mixed gas which is generated in each chamber and contains a water-based resist stripping solution component is sent to a solution recovery/supply system for gas/liquid separation. Recovered resist stripping solution is returned into a stripping solution tank, while separated gas is supplied to a gas knife in each chamber and used for draining solution from a substrate.
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