Thin film acoustic wave device and the manufacturing method thereof
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United States of America Patent
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Issued Date -
Jan 15, 2004
app pub date -
Jul 15, 2002
filing date -
Jul 15, 2002
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Abandoned
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Abstract
A thin film acoustic wave device and the manufacturing method thereof, it provides a method of manufacturing acoustic wave devices of different FOM (figures of merit) by means of the crystalline orientation of the piezoelectric layer in cooperated with the various electric field directions of the driving electrode, so as to provide acoustic wave devices that are optimized under various specifications.
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