SPM sensor and process for producing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jan 15, 2004
app pub date -
Mar 26, 2003
filing date -
May 3, 2002
priority date (Note) -
Abandoned
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Abstract
An SPM sensor having a cantilever, a holding element at one end of the cantilever and a sensor tip at the other end of the cantilever, wherein the holding element is made from a photoresist and the cantilever and/or the tip are made from another material. The photoresist is preferably SU-8, and the other material for the cantilever and/or the tip is preferably silicon, a silicon compound, metals and mixtures thereof. The production of a frame having a plurality of the SPM sensors, wherein both the frame and the holders for the individual SPM sensors and at least the holding element consist of SU-8. The process allows for inexpensive production of the SPM sensors, the sensors being supplied to the user in a frame from which he can detach the sensors.
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