Non-conformal overcoat for nonometer-sized surface structure
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United States of America Patent
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Issued Date -
Dec 4, 2003
app pub date -
May 30, 2002
filing date -
May 30, 2002
priority date (Note) -
Abandoned
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Abstract
A method for non-conformally coating nanometer-sized surface structures includes directing the overcoat material at an oblique angle onto a substrate having a nanometer-sized surface structure so that the overcoat material is only deposited substantially on the top portions of the nanometer-sized surface structures without filling the gaps between the nanometer-sized surface structures. Because the overcoat material is deposited onto the nanometer-sized surface structures obliquely, the overcoat material gradually closes the gaps between the nanometer-sized surface structures and form a continuous layer over the nanometer-sized surface structures.
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