Scanning microscope and beam deflection device
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United States of America Patent
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Issued Date -
Nov 20, 2003
app pub date -
May 16, 2003
filing date -
May 18, 2002
priority date (Note) -
Abandoned
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Abstract
A scanning microscope has a light source that generates a light beam for illumination of a specimen, and has a beam deflection device with which the light beam can be guided over the specimen. The beam deflection device contains at least one rotatable unit having at least one reflecting mirror. A compensation element that executes a motion equal and opposite to that of the rotatable unit is arranged in such a way that it at least partially compensates for the moment of inertia of the rotatable unit.
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