Multiple membrane structure and method of manufacture
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United States of America Patent
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Issued Date -
Nov 13, 2003
app pub date -
May 10, 2002
filing date -
May 10, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A direct digital microphone is constructed of a plurality of first membranes each formed by a micro-machined mesh supported by a substrate. Each of the membranes has a first and a second position. A second membrane is supported by the substrate and positioned above the plurality of first membranes to form a chamber between the plurality of first membranes and the second membrane. A pressure sensor is responsive to pressure in the chamber. Drive electronics are responsive to the pressure sensor for controlling the positions of each of the plurality of first membranes. Output electronics are responsive to the positions of the plurality of first membranes to produce a digital output signal. A stacked membrane structure and methods of fabrication and operation are also disclosed.
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