Micro-dosing pumps and valves
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United States of America Patent
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Issued Date -
Sep 11, 2003
app pub date -
Apr 10, 2002
filing date -
Mar 7, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A fluid mircro pump or valve of a two-stage pulsatile peristaltic type. The pump body has an inlet port and an outlet port. First and second layers of SiO are formed on an Si wafers disposed in face-to-face relationship within the body. The first layers define flexible diaphragms bulge, responsive to a first fluid pressure, between a flat shape and a dome shape containing a pumping chamber. The domes overlap laterally so that fluid is pumped from on chamber to the other as the diaphragms are bulged in serial fashion. Control chambers apply fluid pressure to bulge the domes.
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