Baths for producing microstructures
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United States of America Patent
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app pub date -
Mar 26, 2003
filing date -
Aug 23, 1996
priority date (Note) -
Abandoned
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Abstract
A bath for generating microstructures which is required in numerous fields of application of the microsystem technique and in microstructuring offers a less expensive alternative to known conventional approaches and disposal of the used bath may be carried out in a manner more environmentally friendly manner than in the previous methods for manufacture of microstructures. The bath includes at least one biogenic agent (in particular, an enzyme) which acts upon a preselectable thin layer.
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