Gas recovering apparatus, vacuum exhausting method, and vacuum exhausting apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Aug 20, 2002
filing date -
Jun 13, 1997
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention has an object thereof to make possible the recycling of exhaust gas components in a manufacturing process by cooling, liquefaction, and recovery, and to use toxic or useful gases without disposal, and to dramatically reduce the frequency of exhaust system maintenance by combining such a recovery method with a vacuum exhaust system. In the gas recovering apparatus, followings are disposed downstream from the chamber in an exhaust line; adsorption columns for adsorbing one or more exhaust gas components within a exhaust gas from a chamber, or reaction tubes for directly degrading such components, a means for introducing gas which is able to react to said exhaust gas components upstream from said adsorption tubes or reaction tubes, and cooling tubes for liquefying and recovering exhaust gases from said adsorption tubes or reaction tubes. Furthermore, the present invention also relates to a vacuum exhausting method in which, in the vacuum apparatus, some type of gas is continuously caused to flow within the chamber, and relates to a vacuum exhausting apparatus, in which a mechanism is provided for introducing gas between the vacuum exhausting pump and the chamber.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
OHMI TADAHIRO | 1-17-301 KOMEGAFUKURO 2-CHOME AOBA-KU SENDAI-SHI MIYAGI-KEN | |
KABUSHIKI KAISHA ULTRACLEAN TECHNOLOGY RESEARCH INSTITUTE | 1-4 HONGO 4-CHOME BUNKYO-KU TOKYO 113-0033 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Hashimoto, Taiji | Miyagi-ken, JP | 11 | 73 |
# of filed Patents : 11 Total Citations : 73 | |||
Ino, Kazuhide | Miyagi-ken, JP | 25 | 217 |
# of filed Patents : 25 Total Citations : 217 | |||
Nitta, Takahisa | Tokyo, JP | 46 | 742 |
# of filed Patents : 46 Total Citations : 742 | |||
Ohmi, Tadahiro | Miyagi-ken, JP | 798 | 14083 |
# of filed Patents : 798 Total Citations : 14083 | |||
Shirai, Yasuyuki | Miyagi-ken, JP | 65 | 1037 |
# of filed Patents : 65 Total Citations : 1037 |
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- B01D Class
- 0 % this patent is cited more than
- 22 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jul 27, 2023 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8 |
Jul 31, 2019 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4 |
Feb 09, 2016 | I | Issuance | |
Jan 20, 2016 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Apr 16, 2015 | P | Published | |
Oct 10, 2014 | F | Filing | |
Sep 23, 2014 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MELCHER, UWE;REGEHR, JURGEN;REEL/FRAME:034113/0125 Owner name: SICK ENGINEERING GMBH, GERMANY Effective Date: Sep 23, 2014 |
Oct 11, 2013 | PD | Priority Date |

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