Gas recovering apparatus, vacuum exhausting method, and vacuum exhausting apparatus
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United States of America Patent
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app pub date -
Aug 20, 2002
filing date -
Jun 13, 1997
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Abandoned
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Abstract
The present invention has an object thereof to make possible the recycling of exhaust gas components in a manufacturing process by cooling, liquefaction, and recovery, and to use toxic or useful gases without disposal, and to dramatically reduce the frequency of exhaust system maintenance by combining such a recovery method with a vacuum exhaust system. In the gas recovering apparatus, followings are disposed downstream from the chamber in an exhaust line; adsorption columns for adsorbing one or more exhaust gas components within a exhaust gas from a chamber, or reaction tubes for directly degrading such components, a means for introducing gas which is able to react to said exhaust gas components upstream from said adsorption tubes or reaction tubes, and cooling tubes for liquefying and recovering exhaust gases from said adsorption tubes or reaction tubes. Furthermore, the present invention also relates to a vacuum exhausting method in which, in the vacuum apparatus, some type of gas is continuously caused to flow within the chamber, and relates to a vacuum exhausting apparatus, in which a mechanism is provided for introducing gas between the vacuum exhausting pump and the chamber.
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