Importance

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Abstract

To provide an X-ray fluorescence spectrometer capable of analyzing a semiconductor sample at inexpensive costs non-invasively without incurring damage to the patterned circuits on the semiconductor sample, the X-ray fluorescence spectrometer includes a point source of primary X-rays 3a for emitting primary X-rays B1 used to irradiate a semiconductor sample 1 having circuit patterned areas 1a and scribe line 1b so as to separate the neighboring circuit patterned areas 1a, and a detecting unit 5 for detecting fluorescent X-rays emitted from the semiconductor sample 1. The X-ray fluorescence spectrometer also includes a focusing element 6 for focusing the primary X-rays B1 to form a spot irradiation region of a diameter not greater than 50 .mu.m, a sample recognizing unit 12 for recognizing the scribe line on the semiconductor sample as a target site of measurement, and a positioning mechanism 15 for moving the scribe line 1b on the semiconductor sample to a measurement position where the primary X-rays B1 are focused.

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First Claim