Vacuum processing for fabrication of superconducting films fabricated by metal-organic processing
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United States of America Patent
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N/A
Issued Date -
Jul 10, 2003
app pub date -
Jul 13, 2002
filing date -
Jul 13, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of producing an oriented oxide superconducting film. A metal oxyfluoride film is provided on a substrate. The metal oxyfluoride film comprises the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions. The film is then converted into the oxide superconductor in a processing gas having a total pressure less than atmospheric pressure.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- C25D:PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC ....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- C04B:LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREO....
- B23K:SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLA....
- H01B:CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATER....
- C10F:DRYING OR WORKING-UP OF PEAT
- H01F:MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF M....
- C01F:COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUM....
- B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....
- 2002 Application Filing Year
- C23C Class
- 1421 Applications Filed
- 536 Patents Issued To-Date
- 37.72 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 5 Citation Count
- C23C Class
- 2.74 % this patent is cited more than
- 22 Age