Apparatus and method for controlling the spatial beam position of laser beams and an actuator for use with this apparatus and method
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United States of America Patent
Stats
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N/A
Issued Date -
Jun 26, 2003
app pub date -
Nov 26, 2002
filing date -
Dec 21, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Apparatus and method are disclosed for controlling the spatial beam position of laser beams, e.g., in a laser exposure device, using a position detector for determining the current (actual), beam position and a control element for determining the control quantity based on the difference between the actual and the desired beam position. An actuator that moves an optical element, which in turn guides the laser beam, is provided for changing the beam position. The actuator includes a controllable heating element that is connected to a position-determining actuator element, for moving the actuator element and, thus, the optical element, through thermal expansion due to heating of the actuator element.
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Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 4.44 % this patent is cited more than
- 22 Age