Substrate body coated with multiple layers and method for the production thereof
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United States of America Patent
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Issued Date -
Jun 12, 2003
app pub date -
Oct 7, 2002
filing date -
Apr 6, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a method for producing a wearing protection layer according to a CVD method. Said protection layer consists of a plurality of thin individual layers having a layer thickness of 1 to 100 nm respectively. The respective individual layers are successively deposited on a substrate body. The invention also relates to a correspondingly coated substrate body. According to the invention, the CVD method which is activated by means of a glow discharge plasma is carried out under a pressure of 50 Pa to 1,000 Pa and at a temperature of not more than 750 .degree. C. in such a way that the voltage for producing the glow discharge is switched off while the gas composition is changed for preparing the deposition of the next individual layer or that a gas or a gas mixture of argon, hydrogen and/or nitrogen is led into the coating container at an essentially constantly high temperature and the glow discharge is maintained by applying a voltage of 200 V to 1,000 V over a period that is shorter than the period of coating of the last individual layer.
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