Aqueous grinding fluid for wire-sawing or band-sawing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20030100455A1
SERIAL NO

09569642

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Abstract

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An aqueous grinding fluid has compositions mainly consisting of 40.0-95.0 wt. % a polyalcohol and/or a polyalcohol derivative, 5.0-50.0 wt. % water, 0.1-3.5 wt. % bentonite, 0.1-5.0 wt. % cellulose and weight %, 0.5-10.0 wt. % mica and optionally a small amount of a surfactant or polar solvent. Bentonite, cellulose and mica are preferably added with such combination to adjust a viscosity of a slurry to 150-300 mPa.second as a value measured by a rotating cylinder type viscometer. The aqueous suspension is nonflammable and stabilized in dispersiveness and settleability-proof of abrasive grits as well as a viscosity for a long time, and facilitates washing and cleaning of sliced wafers and a grinding machine without radiation of stinks.

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Patent Owner(s)

Patent OwnerAddress
SUPER SILICON CRYSTAL RESEARCH INSTITUTE CORPORATION555-1 NAKANOYA ANNAKA-SHI GUNMA-KEN 379-0125
OHTOMO CHEMICAL INDUSTRIAL CORPORATION17-10 YAHIRO 2-CHOME SUMIDA-KU TOKYO 131-0041

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakawa, Keiichiro Annaka-shi, JP 11 103
Matsuzaki, Junichi Annaka-shi, JP 14 76
Oishi, Hiroshi Annaka-shi, JP 82 922

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