Closed-loop control of MEMS mirrors for optical communications

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United States of America Patent

APP PUB NO 20030091270A1
SERIAL NO

10254436

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A control system for a moveable mirror array in an optical cross connect (OXC) compensates for non-linear actuation charge response, actuation leakage, asymmetry in the derivative driving scheme of the electrostatic actuated mirror and its driving circuitry. In addition zero-crossing is resolved with a near-zero algorithm or a off-zero algorithm, which are alternately applied whether or not the mirror's target orientation is within a critical threshold. The threshold is defined as an ambiguous orientation range of the mirror while the actuating electrodes are substantially at zero charge. The control system includes an optical feedback loop that utilizes a PDA detector that provides coordinate information about an impinging laser injected into the optical telecommunication signals switched by the OXC. The laser is filtered from the reflected beam prior to its impinging on the detector. The telecommunication signal remains substantially unaffected by the optical feedback loop.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORP2200 MISSION COLLEGE BLVD SC4-202 SANTA CLARA CA 95052

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abbott, Eric C North Bend, WA 2 9
Logan, Michael Woodinville, WA 22 134
Sprague, Randall B Carnation, WA 50 1961

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