Ultraviolet light source driven by capillary discharge plasma and method for surface treatment using the same
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United States of America Patent
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Issued Date -
Apr 17, 2003
app pub date -
Oct 15, 2001
filing date -
Oct 15, 2001
priority date (Note) -
Abandoned
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Abstract
The present invention discloses an ultraviolet light source driven by a capillary discharge plasma and a method for surface treatment using the same. More specifically, an ultraviolet light source driven by a capillary discharge plasma includes an AC power supply as a power source, at least one first electrode connected to the power source, a dielectric body having at least one capillary discharge site therein and enclosing at least a portion of the first electrode, wherein each capillary discharge site is substantially aligned with each first electrode, so that the first electrode is exposed by the capillary site, at least one second electrode electrically coupled to the first electrode, a gas tight chamber enclosing the first and second electrodes and the dielectric body including a working gas, and a window attached to the chamber substantially passing only ultraviolet light from a capillary discharge plasma.
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