Method and apparatus having plate electrode for surface treatment using capillary discharge plasma
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United States of America Patent
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Issued Date -
Apr 17, 2003
app pub date -
Oct 15, 2001
filing date -
Oct 15, 2001
priority date (Note) -
Abandoned
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Abstract
A method and an apparatus for treating a workpiece using a plasma discharge are disclosed in the present invention. In treating a workpiece using a plasma discharge, the apparatus includes at least one plate electrode electrically coupled to a power source, a dielectric body having first and second sides, wherein the first side is coupled to the at least one plate electrode and the second side has at least one capillary extending substantially therethrough in a direction of the first side of the dielectric body, and a counter electrode electrically coupled to the power source.
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