Method for producing components and ultrahigh vacuum CVD reactor
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United States of America Patent
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Issued Date -
Apr 17, 2003
app pub date -
Oct 12, 2001
filing date -
Oct 12, 2001
priority date (Note) -
Abandoned
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Abstract
A method, installation and reactor is for the production of components or of their intermediate products. Each component in the process of being produced as a structural member, is subjected to a treatment process and several of the structural members are simultaneously subjected to a common CVD process under conditions of ultrahigh vacuum. The treatment process is a vacuum process and from it the structural members are supplied to the CVD process under vacuum.
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