Thin film thermistor and method of adjusting reisistance of the same
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United States of America Patent
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Issued Date -
Apr 3, 2003
app pub date -
Sep 26, 2002
filing date -
Sep 28, 2001
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Abandoned
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Abstract
In a thin film thermistor with a cutting portion of a metallic pattern for resistance adjustment, initially, the resistance is roughly adjusted by adjusting the film thickness of a second heat-sensitive film, and secondly finely adjusted by trimming the cutting portion by laser irradiation. Thus, the thin film thermistor with a resistance adjusted accurately can be produced.
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