Microelectromechanical component
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United States of America Patent
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N/A
Issued Date -
Feb 13, 2003
app pub date -
Jun 28, 2002
filing date -
Jul 2, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate, and comprising two input terminals and two output terminals, characterized in that it also comprises: a moveable element (4) connected to the substrate by at least one deformable portion, and including a region made of a ferromagnetic material; a metal coil (5) connected to the input terminals or output terminals (30, 31), capable of interacting magnetically with the ferromagnetic region of the moveable element (4); a surface forming a first electrode (6), connected to one of the output terminals or input terminals, placed opposite a complementary surface secured to the moveable element (4), this complementary surface forming a second electrode connected to the other of the output or input terminals, and being capable of interacting electrostatically with the first electrode (6).
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