Microelectromechanical component
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United States of America Patent
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Issued Date -
Feb 13, 2003
app pub date -
Aug 6, 2002
filing date -
Aug 6, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate (10) and comprising two input terminals (7, 8) and two output terminals (26, 27), which also comprises: a metal input coil (2), connected to the input coils (7, 8) and capable of producing a magnetic field when a current flows through it; a movable element (3), connected to the substrate by at least one deformable portion and including at least one region (11, 12) made of a ferromagnetic material, said movable element (3) being capable of moving under the effect of the force, to which the region (11) made of a ferromagnetic material is subject, generated by the magnetic field produced by the input coil (2); an output member (4) forming a magnetic sensor, connected to the output terminals (26, 27) and capable of producing an electrical signal that can be varied according to the movement of the movable element (3).
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