Holographic grating fabrication using mirror with surface curvature
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United States of America Patent
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Issued Date -
Jan 23, 2003
app pub date -
Jul 18, 2001
filing date -
Jul 18, 2001
priority date (Note) -
Abandoned
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Abstract
A method and apparatus for forming a device in a substrate having grating structure, includes a substantially coherent and collimated light source, a mirror having a non-planar surface, and a substrate. The mirror, substrate, and stationary light source are disposed in fixed position with respect to one another. The components are arranged such that some light beams from the light source are projected directly onto the substrate surface and other light beams are reflected from the mirror surface onto the substrate surface. The respective beams converge at the substrate surface at different interference angles across the substrate surface. The different interference angles produce an interference pattern having a varying interference period which preferably uniformly increases or decreases across the substrate. The corresponding grating structure formed within the substrate using this interference pattern, therefore also includes the varying grating period. The device formed in the substrate may be a laser.
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