Apparatus and method for sterilization of articles using capillary discharge atmospheric plasma
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United States of America Patent
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Issued Date -
Jan 23, 2003
app pub date -
Jul 19, 2001
filing date -
Jul 19, 2001
priority date (Note) -
Abandoned
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Abstract
The present invention discloses an apparatus and method for sterilization of articles using capillary discharge atmospheric plasma. More specifically, an apparatus for sterilizing articles using substantially atmospheric pressure plasma includes a plasma generator generating the substantially atmospheric pressure plasma, wherein the plasma generator includes, first and second dielectrics facing into each other, wherein at least one capillary is formed in at least one of the dielectrics, and first and second electrodes on the first and second dielectric bodies, receiving the potential from the power supply, a processing chamber enclosing the plasma generator, and a power supply providing a potential to the plasma generator.
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