Thin film shape memory alloy actuated flow controller
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United States of America Patent
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Issued Date -
Jan 2, 2003
app pub date -
Mar 7, 2002
filing date -
Mar 7, 2001
priority date (Note) -
Abandoned
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Abstract
A flow controller for use in microelectromechanical systems. The principal components of the controlled are a microvalve and sensor which are micromachined on one surface of a substrate that is formed with a fluid flow channel. The microvalve includes a shape memory alloy actuator element that is operated by a feedback signal from a control circuit. The sensor can be a fluid flow rate sensor or a fluid temperature sensor or a fluid pressure sensor. Conditions in the channel are sensed for generating the feedback signal.
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