Method and apparatus for removing acid gases from the exhaust of lasers
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United States of America Patent
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Issued Date -
Dec 26, 2002
app pub date -
Apr 29, 2002
filing date -
Mar 4, 1999
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Abandoned
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Abstract
Method and apparatus for removing acid gases from the exhaust of lasers, which comprises adding to the effluent of the laser generator a reactive, solid, powdery material, consisting in a metal oxide or hydroxide, preferably chosen from among magnesium or calcium oxide or hydroxide, and allowing the effluent to be dispersed in the environment with the reaction products of the metal oxide with the HF/DF gases and with any unreacted amount of the metal oxide. The reactive, powdery material may be fed into laser exhaust plume formed by the laser effluent or into the primary stream which drives the exhaust gases through the ejector. The amount of metal oxides that can be used may be at least stoichiometric with respect to the HF/DF gases.
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