Manufacturing method for a high quality film bulk acoustic wave device

United States of America Patent

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Issued Date
Dec 19, 2002
app pub date
Apr 30, 2002
filing date
Jun 15, 2001

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Abstract

A manufacturing method for a high quality film bulk acoustic wave device, wherein a lower electrode protecting layer is partially defined or not applied, thus the quality factor of the bulk acoustic wave device is improved.

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ASIA PACIFIC MICROSYSTEM INC	HSINCHU

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Inventor Name	Address	# of filed Patents	Total Citations
Lee, Chenkuo	Hsin-Chu City, TW	2	187
Lin, Chung-Hsien	Cha-I-City, TW	82	1467
Lu, Ju-Mei	Ma-Kung City, TW	6	200
Tsai, Shu-Hui	Hsin-Chu City, TW	12	317

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Manufacturing method for a high quality film bulk acoustic wave device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10134369

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10134369

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