Substrate processing apparatus, substrate processing system, and substrate conveying method
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United States of America Patent
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N/A
Issued Date -
Dec 5, 2002
app pub date -
Mar 7, 2002
filing date -
Mar 9, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A substrate processing apparatus for providing predetermined processing to wafers brought in through the load port door comprises in the front of the load port door a load port table on which a wafer carrier accommodating a plurality of wafers is placed, and a shield plate is provided so as to surround the load port table.
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