METHOD FOR REGULATING A COATING PROCESS UTILIZING THE INTENSITY OF A LIGHT BUNDLE
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United States of America Patent
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Issued Date -
Oct 31, 2002
app pub date -
Mar 10, 2000
filing date -
Sep 10, 1997
priority date (Note) -
Abandoned
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Abstract
A method for regulating a coating process for the application of a layer onto a substrate having a diffracted structure is provided. The intensity of a light bundle falling onto a coated substrate and diffracted thereby is determined after transmission and/or reflection of the light bundle for at least the first order or a higher order, and this intensity is utilized as the actual value for regulating the layer thickness.
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