Formation of an optical component having smooth sidewalls
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 31, 2002
app pub date -
Apr 27, 2001
filing date -
Apr 27, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method of forming an optical component having a light transmitting medium positioned over a base is disclosed. The method includes forming a mask over the light transmitting medium. The mask is formed so as to protect a region of the light transmitting region where a waveguide is to be formed. The method also includes applying an etching medium to the light transmitting medium so as to form one or more surfaces of the waveguide. The etching medium includes a fluorine-containing gas, one or more partial passivants and Oxygen.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully