Plasma synthesis of titanium dioxide nanopowder and powder doping and surface modification process
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United States of America Patent
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Issued Date -
Oct 24, 2002
app pub date -
Apr 24, 2001
filing date -
Apr 24, 2001
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Abstract
A process and apparatus for the synthesis of metal oxide nanopowder from a metal compound vapour is presented. In particular a process and apparatus for the synthesis of TiO.sub.2 nanopowder from TiCl.sub.4 is disclosed. The metal compound vapour is reacted with an oxidizing gas in an electrically induced RF frequency plasma thus forming a metal oxide vapour. The metal oxide vapour is rapidly cooled using a highly turbulent gas quench zone which quickly halts the particle growth process, yielding a substantial reduction in the size of metal oxide particles formed. The metal compound vapour can also be reacted with a doping agent to create a doped metal oxide nanopowder. Additionally, a process and apparatus for the inline synthesis of a coated metal oxide is disclosed wherein the metal oxide particles are coated with a surface agent after being cooled in a highly turbulent gas quench zone.
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