DUST RECIRCULATION IN THE DIRECT SYNTHESIS OF CHLOROSILANES AND METHYLCHLOROSILANES IN A FLUIDIZED BED
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United States of America Patent
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Oct 15, 2002
Grant Date -
Oct 17, 2002
app pub date -
Apr 10, 2002
filing date -
Apr 12, 2001
priority date (Note) -
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Abstract
A continuous process for the direct synthesis of silanes of the formula R.sub.aSiCl.sub.4-a (1) involves reacting finely divided silicon metal with R--Cl in a fluidized bed, where R is hydrogen, methyl or ethyl and a is 0, 1, 2, 3 or 4, where a product stream comprising gaseous silanes of the formula 1, further gaseous reaction products, unreacted RCl and silicon-containing dust is discharged from the fluidized bed, wherein at least part of the dust is introduced in the form of a suspension in a liquid selected from among liquid silanes of the formula 1, further liquid reaction products and mixtures thereof, into the fluidized bed.
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