SDS gas bottle thermo pressurizer
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United States of America Patent
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Issued Date -
Oct 17, 2002
app pub date -
Apr 12, 2001
filing date -
Apr 12, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and apparatus for extending the useful operating life of a low-pressure gas bottle for use in a semiconductor device manufacturing process. As the gas bottle is detected to be approaching an empty condition, the gas in the bottle is safely heated in a manner that causes gas molecules to be released from an absorbent material used in the bottle. In a preferred embodiment, a thermo-pressurizer, including a heating blanket that surrounds the gas bottle and a temperature controller coupled to the heating blanket, causes the pressure in the gas bottle to be elevated, thereby releasing gas molecules from the absorbent material.
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