Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Sep 26, 2002
app pub date -
Feb 19, 2002
filing date -
Mar 7, 1996
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention relates to a radiation sensitive photoresist composition comprising a photoacid initiator and a polycyclic polymer comprising repeating units that contain pendant acid labile groups. Upon exposure to an imaging radiation source the photoacid initiator generates an acid which cleaves the pendant acid labile groups effecting a polarity change in the polymer. The polymer is rendered soluble in an aqueous base in the areas exposed to the imaging source.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
THE B F GOODRICH COMPANY | 3925 EMBASSY PARKWAY AKRON OHIO 44313-1799 |
International Classification(s)

- 2002 Application Filing Year
- G03F Class
- 1277 Applications Filed
- 505 Patents Issued To-Date
- 39.55 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Goodall, Brian L | Akron, OH | 59 | 1458 |
# of filed Patents : 59 Total Citations : 1458 | |||
Jayaraman, Saikumar | Cuyahoga Falls, OH | 87 | 1079 |
# of filed Patents : 87 Total Citations : 1079 | |||
Rhodes, Larry F | Silverlake, OH | 116 | 936 |
# of filed Patents : 116 Total Citations : 936 | |||
Shick, Robert A | Strongsville, OH | 21 | 445 |
# of filed Patents : 21 Total Citations : 445 |
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Patent Citation Ranking
- 9 Citation Count
- G03F Class
- 1.72 % this patent is cited more than
- 23 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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