Method of fabricating capillary discharge plasma display panel using combination of laser and wet etchings
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United States of America Patent
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Issued Date -
Sep 12, 2002
app pub date -
Oct 15, 2001
filing date -
Nov 14, 2000
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Abandoned
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Abstract
A method of fabricating a plasma display panel having a substrate includes the steps of forming an electrode on the substrate, forming a dielectric layer on the substrate including the electrode, forming at least one capillary in the dielectric layer using dry-etching, wherein the capillary and the electrode are separated apart by a portion of the dielectric layer, and sequentially removing the portion of dielectric layer to expose the electrode through the capillary.
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