Substrate positioning system
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United States of America Patent
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N/A
Issued Date -
Sep 12, 2002
app pub date -
Feb 20, 2002
filing date -
Feb 20, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate positioning system is provided to facilitate the performing of certain processing on the substrate, such as ion implantation. The system comprises a linkage rotatably mounted to a base and an end effector member rotatably mounted to the linkage and configured for receiving a substrate. Through the synchronized rotation of the linkage about the base and the end effector member about the linkage, the system acts as a robotic unit to move the substrate to the desired location for performing processing thereon. In another aspect, the base is movable along an axis such that the system maintains a constant distance of travel for an ion beam incident on the substrate as the linkage and end effector member travel in a curved path.
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