Heating device, method for producing same and film forming apparatus
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United States of America Patent
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Issued Date -
Sep 12, 2002
app pub date -
Feb 28, 2002
filing date -
Mar 9, 2001
priority date (Note) -
Abandoned
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Abstract
A heating device producible at a low cost and capable of heating to high temperatures, a method for producing the heating device, and a film forming apparatus using the heating device are provided. The heating device comprises a support base adapted to support a substrate and comprising aluminum or an aluminum alloy, a sheathed heater provided within the support base, and support plates provided within the support base and comprising a metallic material having a melting point of 850.degree. C. or higher.
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